TLM-SCAN+
Contact resistivity and more

Stripe chuck

Holds 14 solar cell stripes, 6 - 10 mm wide and 156 mm long, with individual vacuum switches. Blank areas contact the back metal of the stripes and allow measuring the shunt conductance of each finger. A fixture to clamp the stripes vertically facilitates inspecting the sample cross-section with the microscope camera.

Glass chuck

Flat chuck for wafers that is easily cleaned such that measured samples may go back to the process line. This chuck is also used for samples with test structures for TLM and line-resistance.


TLM-SCAN